FFKM chemical resistant seal
Classification:Sealing element
A peroxide-cured perfluoroether rubber. Mainly used in semiconductor, flat panel display, photovoltaic, petrochemical and other industries. This product is strong acid, alkali, organic solvent chemicals and high temperature steam, can show a very superior and stable characteristics. It has high pressure resistance and rapid gas decompression sealing characteristics.
The final packaging and cleaning of this product are completed in a dust-free room.
Physical and Mechanical Properties
Honseal-6561B1
| Hardness (Shore A) | 65 |
| Color | Black |
| 100% Modules (MPa) | 6.3 |
| Tensile strength (MPa) | 17.9 |
| Elongation at break (%) | 173 |
| Compression set (%,70hr @ 200℃) | 15 |
| Maximum continuous working temperature (℃) | 250 |
Honseal-7061B1
| Hardness (Shore A) | 70 |
| Color | Black |
| 100% Modules (MPa) | 9.8 |
| Tensile strength (MPa) | 21.4 |
| Elongation at break (%) | 168 |
| Compression set (%,70hr @ 200℃) | 24 |
| Maximum continuous working temperature (℃) | 250 |
Honseal-7561B1
| Hardness (Shore A) | 75 |
| Color | Black |
| 100% Modules (MPa) | 9.7 |
| Tensile strength (MPa) | 21.1 |
| Elongation at break (%) | 169 |
| Compression set (%,70hr @ 200℃) | 18 |
| Maximum continuous working temperature (℃) | 250 |
Honseal-7561W1
| Hardness (Shore A) | 75 |
| Color | White |
| 100% Modules (MPa) | 6 |
| Tensile strength (MPa) | 25.6 |
| Elongation at break (%) | 190 |
| Compression set (%,70hr @ 280℃) | 29 |
| Maximum continuous working temperature (℃) | 250 |
Honseal-7562B2
| Hardness (Shore A) | 75 |
| Color | Black |
| 100% Modules (MPa) | 10.4 |
| Tensile strength (MPa) | 15.6 |
| Elongation at break (%) | 135 |
| Compression set (%,70hr @ 280℃) | 30 |
| Maximum continuous working temperature (℃) | 300 |
Honseal-8061B1
| Hardness (Shore A) | 80 |
| Color | Black |
| 100% Modules (MPa) | 12.5 |
| Tensile strength (MPa) | 22 |
| Elongation at break (%) | 152 |
| Compression set (%,70hr @ 200℃) | 23 |
| Maximum continuous working temperature (℃) |
250
|
Honseal-9001B2
| Hardness (Shore A) | 90 |
| Color | Black |
| 100% Modules (MPa) | 24 |
| Tensile strength (MPa) | 27.3 |
| Elongation at break (%) | 115 |
| Compression set (%,70hr @ 200℃) | 30 |
| Maximum continuous working temperature (℃) |
250
|
Product Description
Recommended Application Location
Chamber and Valve Seals
Gas inlet/outlet Seals
Reactant delivery system Seals
Lid and Window Seals
Door and Gat Seals
Recommended application process
Thin film deposition processes (CVD,PECVD,HDPCVD,APCVD,LPCVD,SACVD)
Dry Etched Process
Oxidation
Diffusion process
Wet and clean processes
Metallization treatment（Metalization CVD/PVD,Sputtering,Evaporation)
Remote Plasma Clean
Product Documentation
Keywords：FFKM chemical resistant seal
Related Products
Sealing element
FFKM Precompound
FFKM Raw Gum
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