FFKM high temperature resistant seal
Classification:Sealing element
A triazine-vulcanized, high-temperature-resistant perfluoroether rubber is a terpolymer of tetrafluoroethylene and perfluoromethyl vinyl ether (TFE PMVE CSM). Suitable for application in semiconductors, panel manufacturing dry etching process, rapid thermal process, and diffusion process. High-temperature process for petrochemicals, etc. For most organic solvents, acids, and alkali chemicals can show excellent and stable characteristics, but not recommended for high-temperature steam, or hot amine chemicals (Amine) environments.
This product's final packaging and cleaning are completed in a dust-free room.
Physical and Mechanical Properties
Honseal-7501B3
| Hardness (Shore A) | 75 |
| Color | Black |
| Tensile strength (MPa) | 22.6 |
| Elongation at break (%) | 160 |
| Compression set (%,70hr @ 200℃) | 30 |
| Maximum continuous working temperature (℃) | 325 |
Honseal-8001W3
| Hardness (Shore A) | 80 |
| Color | White |
| 100% Modules (MPa) | 8.2 |
| Tensile strength (MPa) | 19.5 |
| Elongation at break (%) | 165 |
| Compression set (%,70hr @ 200℃) | 17.2 |
| Maximum continuous working temperature (℃) | 315 |
Product Description
Recommended Application Location
Chamber and Valve Seals
Gas inlet/outlet Seals
Reactant delivery system Seals
Lid and Window Seals
Door and Gat Seals
Recommended application process
Thin film deposition processes (CVD,PECVD,HDPCVD,APCVD,LPCVD,ALD)
Dry etching process (Dry ETCH)
Oxidation process (Oxidation)
Diffusion process (Diffusion)
Ion Implantation and Rapid Thermal Processing (IMP,RTP)
Metallization treatment（Metalization CVD/PVD,Sputtering,Evaporation)
Product Documentation
Keywords：FFKM high temperature resistant seal
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