Products

Products
Sealing element
FFKM Compound
FFKM Precompound
FFKM Raw Gum
KF Center Ring

KF Center Ring

Product application

In semiconductor manufacturing processes, KF center rings are commonly used in vacuum chambers, gas delivery systems, and reaction chambers to prevent leaks of corrosive gases and chemicals. High-Purity Fluid Handling Systems Vacuum Systems High-Temperature Environments Corrosive Environments

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Door Seal

Door Seal

Product application

Chamber

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FFKM UltraPure seal

FFKM UltraPure seal

Product characteristics

FFKM high-quality material is a transparent color or amber high-performance material. Designed to meet the demanding plasma, strong corrosive gases and ultra-clean process requirements in semiconductor manufacturing. Its unique formulation provides excellent plasma and chemical resistance, extremely low metal content, low outgassing, and excellent mechanical and sealing properties.

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FFKM chemical resistant seal

FFKM chemical resistant seal

Product characteristics

This product is strong acid, alkali, organic solventchemicals and high temperature steam, can show a verysuperior and stable characteristics.

Product application

Reaction chamber and valve seals Gas inlet and outlet seals Reactant delivery seal Cover and Window Seals Door and Gate Seals

Product process

CVD,PECVD,HDPCVD,APCVD,LPCVD,SACVD、 Dry ETCH、Oxidation、Diffusion、Wet and Cleaning、Metalization CVD/PVD,Sputtering,Evaporation、 Remote Plasma Clean

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FFKM high temperature resistant seal

FFKM high temperature resistant seal

Product characteristics

Suitable for application in semiconductor, panel manufacturing dry etching process, rapid therma process, diffusion process. High temperature processfor petrochemicals, etc.

Product application

Reaction chamber and valve seals Gas inlet and outlet seals Reactant delivery seal Cover and Window Seals Door and Gate Seals

Product process

CVD,PECVD,HDPCVD,APCVD,LPCVD,ALD, DrY ETCH, Oxidation,Diffusion,IMP,RTP,Metalization CVD/PVD,Sputtering,Evaporation

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FFKM special-shaped seal ring

FFKM special-shaped seal ring

Product characteristics

The special-shaped seal ring is a special seal, which can adapt to different shapes of the sealing surface, and can maintain good sealing performance under high pressure,high temperature, corrosion and other harsh environments, Because the special-shaped seal ring can fill the tiny gap, so its sealing performance is more superior than other seals.

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