In semiconductor manufacturing processes, KF center rings are commonly used in vacuum chambers, gas delivery systems, and reaction chambers to prevent leaks of corrosive gases and chemicals. High-Purity Fluid Handling Systems Vacuum Systems High-Temperature Environments Corrosive Environments

Chamber

FFKM high-quality material is a transparent color or amber high-performance material. Designed to meet the demanding plasma, strong corrosive gases and ultra-clean process requirements in semiconductor manufacturing. Its unique formulation provides excellent plasma and chemical resistance, extremely low metal content, low outgassing, and excellent mechanical and sealing properties.

This product is strong acid, alkali, organic solventchemicals and high temperature steam, can show a verysuperior and stable characteristics.

Reaction chamber and valve seals Gas inlet and outlet seals Reactant delivery seal Cover and Window Seals Door and Gate Seals

CVD,PECVD,HDPCVD,APCVD,LPCVD,SACVD、 Dry ETCH、Oxidation、Diffusion、Wet and Cleaning、Metalization CVD/PVD,Sputtering,Evaporation、 Remote Plasma Clean

Suitable for application in semiconductor, panel manufacturing dry etching process, rapid therma process, diffusion process. High temperature processfor petrochemicals, etc.

Reaction chamber and valve seals Gas inlet and outlet seals Reactant delivery seal Cover and Window Seals Door and Gate Seals

CVD,PECVD,HDPCVD,APCVD,LPCVD,ALD, DrY ETCH, Oxidation,Diffusion,IMP,RTP,Metalization CVD/PVD,Sputtering,Evaporation

The special-shaped seal ring is a special seal, which can adapt to different shapes of the sealing surface, and can maintain good sealing performance under high pressure,high temperature, corrosion and other harsh environments, Because the special-shaped seal ring can fill the tiny gap, so its sealing performance is more superior than other seals.

Peroxide vulcaniztion system perfluorinatomer, suitable for perfluorinated universal O-rings, gaskets and other miscellaneous parts

Very broad tolerance to most chemicals.

Articles for cleaning and chemical etching processes inthe semiconductor industry and molded articles for wetchemistry can be produced.

Based on Russian imported triazine vulcanized perfluorinated ether compound, hardness 75 degreesBased on Russlan imported triazine vulcanizedperfluorinated ether compound, hardness 70~75degrees

Articles for cleaning and chemical etching processes inthe semiconductor industry and molded articles for wetchemistry can be produced.

Triazine vulcanization system perfluorinated, suitable for high temperature resistant perfluorinated universal O-rings, gaskets and other miscellaneous parts, not suitable for steam or hot amine working environment O-rings, gaskets and molded parts

Triazine vulcanization system perfluorinated, suitablefor high temperature resistant perfluorinated universalO-rings, gaskets and other miscellaneous parts, notsuitable for steam or hot amine working environment

Peroxyvulcanized perfluorinated ether compoundimported from Russia, hardness 70~75 degreesPeroxyvulcanized perfluorinated ether compound basedon Russian imports, hardness 90 deqrees

Articles for cleaning and chemical etching processes inthe semiconductor industry and molded articles for wetchemistry can be produced.