Typical semiconductor component: Vacuum system (1)
Category： News
Time：2024-12-09
Vacuum System - The Largest Semiconductor Subsystem
Vacuum refers to the state of gas in a given space that is below atmospheric pressure. Vacuum technology is the technology required to create a physical environment below atmospheric pressure, as well as to carry out processes, physical measurements, and scientific experiments in this environment.
Manufacturing semiconductor chips must be done in a vacuum environment to avoid oxidation and contamination, ensuring chip quality and performance.
At normal temperature and pressure, the environment contains a large amount of impurities, making chips susceptible to oxidation and contamination during the semiconductor manufacturing process, which severely affects chip quality and production efficiency.
In vacuum technology, vacuum degree is commonly used to measure the thinness of gas in a vacuum state, usually represented by the pressure value of the gas. The higher the pressure value, the lower the vacuum degree; the lower the pressure value, the higher the vacuum degree. A vacuum system consists of components such as vacuum pumps, control systems, gas storage tanks, and piping installations, including many core semiconductor components like molecular pumps, cryopumps, dry pumps, isolation valves, control valves, transfer valves, and O-Ring seals.
Source: Vacuum Technology Equipment Network
| Effects of Achieving Vacuum Conditions | Benefits |
| Clean Environment | Removal of particles, unwanted gases, water vapor, and contaminants |
| Reduction of Molecular Density | Decrease in molecular density within the system |
| Increase in Molecular Collision Distance | Creation of plasma zones required for processes like sputtering and etching in the semiconductor manufacturing industry |
| Acceleration of Reaction Processes | Reduction of the pressure of reaction vapors |
Source: 'Semiconductor Manufacturing Technology' - Michael Quirk
| Vacuum Degree Range | Pressure Range | Main Application Areas |
| Low Vacuum | 10^5Pa-10^2Pa | Using the pressure difference obtained from low vacuum to hold, lift, and transport materials, as well as for dust collection and filtration. |
| Medium Vacuum | 10^2Pa-10^1Pa | Generally used to remove gases or moisture retained or dissolved in materials, manufacture light bulbs, vacuum metallurgy, and serve as thermal insulation. |
| High Vacuum | 10^-1Pa-10^-5Pa | Used in thermal insulation, electrical insulation, and to avoid molecular electronic ion collisions. |
| Ultra High Vacuum | <10^-5Pa | Commonly used in research on controllable thermonuclear fusion, the production of time reference hydrogen molecular mirrors, and research in surface physics and surface chemistry. |
Source: Maderbao Vacuum Equipment Group, Zhongke Instrument Prospectus
Keywords： Typical semiconductor component: Vacuum system (1)
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